Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

2002.11a
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Pages.288-291
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2002

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)

권호 표지

Dielectrical properties of PST thin films for tunable microwave device

Tunable 소자 응용을 위한 솔젤법으로 제작한 PST 박막의 유전 특성

Kim, Kyoung-Tae (Chung-Ang Univ.) ;
Kim, Chang-Il (Chung-Ang Univ.) ;
Lee, Cheol-In (Ansan College) ;
Kim, Tae-Hyung (Yeojoo Technical College)

김경태 (중앙대학교 전자전기공학부) ;
김창일 (중앙대학교 전자전기공학부) ;
이철인 (안산대학 전기과) ;
김태형 (여주대학 전기과)

Published : 2002.11.07

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Abstract

An alkoxide-based sol-gel method was used to fabricate $(Pb_{x},Sr_{1-x})$TiO3 (PST) thin films on a Pt/Ti/SiO2/Si substrate, and the dielectric properties of the PST thin films were investigated as a function of the Pb/Sr composition for use in tunable microwave device applications. The dielectric properties of the PST films were strongly dependent on the Pb/Sr ratio. The dielectric constant and dielectric loss of the PST films increased with increasing Pb content, and the figure of merit (FOM) reached a maximum value of 27.5 at a Pb/Sr ratio of 4:6. The tunability increased with increasing Pb content. The dielectric constant, loss factor, and tunability of PST (50/50) thin films were 404, 0.023, and 51.73%, respectively. From the result, the PST films with good dielectric properties are useful candidates for tunable microwave device.

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