Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.02a
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- Pages.115-115
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- 2002
Growth of $TiO_2$ thin films on Si(100) and Si(111) substrates using MOCVD and comparison of growth behavior and structural Properties
- Jung, C.K. (Department of Chemistry and Institute of Basic Science, Sung kyun kwan University) ;
- Lee, S.B. (Department of Chemistry and Institute of Basic Science, Sung kyun kwan University) ;
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Boo, J.H.
(Department of Chemistry and Institute of Basic Science, Sung kyun kwan University)
- Published : 2002.02.19
Abstract
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