한국윤활학회:학술대회논문집 (Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference)

한국트라이볼로지학회 (Korean Tribology Society)
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Friction and Pull-off Forces on Submicron-Size Asperity Measured in High Vacuum

  • Ando, Y. (Institute of Mechanical Systems Engineering, National Institute of Advanced Industrial Science and Technology (AIST))
  • 발행 : 2002.10.21
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초록

Asperity arrays and Independent asperities were fabricated on a silicon plate. Then pull-off and friction forces were measured on each asperity pattern by using AFM (atomic force microscope) in humid air and high vacuum of $2{\times}10^{-5}$ Pa. The probe of AFM cantilever has a flat square of about $1\;{\mu}m^2$ on its tip. The results showed that the pull-off force was proportional to the curvature radius of asperity peak in each ambient condition. The friction force was proportional to the pull-off force and was slightly higher in the humid air than in the high vacuum.

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