한국윤활학회:학술대회논문집 (Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference)
- 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
- /
- Pages.167-168
- /
- 2002
Effects of oxide layer formed on TiN coated silicon wafer on the friction characteristics
초록
In this study, the effects of oxide layer formed on the wear tracks of TiN coated silicon wafer on friction characteristics were investigated. Silicon wafer was used for the substrate of coated disk specimens, which were prepared by depositing TiN coating with