토러스 형상 돌기의 흡착특성 유한요소해석

Adhesive contact characteristics of torus-shaped bumps, which are commonly used to reduce friction and stiction in hard disks, are analyzed to examine the applicability to the MEMS structure. The analysis is conducted with the finite element technique considering the adhesive force. Torus-shaped bumps of various rim and bump radii are analyzed. The jump-to-contact behavior, adhesion hysterisis, pull-off forces, contact region and pressure, and surface and subsurface stresses are presented and discussed. Analysis results in the absence of adhesive force are also presented to identify the effect of adhesive force.