Proceedings of the Korean Magnestics Society Conference (한국자기학회:학술대회 개요집)

  • 2003.12a
  • /
  • Pages.50-50
  • /
  • 2003
  • /
  • 2233-9485(pISSN)
  • /
  • 2233-9574(eISSN)
The Korean Magnetics Society (한국자기학회)
권호 표지

Controlled oxidization process for ultra-thin aluminium films in high-performance magnetic tunnel junctions by using the microwave-excited plasma with radial line slot antenna

  • Tsunoda Masakiyo (Department of Electronic Engineering, Tohoku University) ;
  • Yoshimura Satoru (Department of Electronic Engineering, Tohoku University) ;
  • Takahashi Migaku (Department of Electronic Engineering, Tohoku University, New Industry creation Hatchery Center, Tohoku University)
  • Published : 2003.12.01
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Abstract

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