Preparation of Boron Carbide Thin Films by Reactive sputtering of Boron

  • Lee K. E. (Department of Material science & engineering, Chungnam National University) ;
  • Lee J. Y. (R&D center, Semtech Co. Ltd., Chungnam National University) ;
  • Park M. J. (R&D center, Semtech Co. Ltd., Chungnam National University) ;
  • Kim J. H. (ReCAMM, Chungnam National University) ;
  • Lee C. B. (R&D center, Semtech Co. Ltd., Chungnam National University) ;
  • Kim Y. I. (KRISS) ;
  • Kim C. O. (Department of Material science & engineering, Chungnam National University)
  • Published : 2003.12.01