Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2003.07a
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- Pages.36-37
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- 2003
Ellipsometric Investigation of Optical Property of AgOx mask layer for Super-RENS Application
타원법을 이용한 Super-RENS 용 AgOx mask 층의 광물성 연구
- Xuezhe Li (Department of Molecular Science and Technology, Ajou University) ;
- Kim, Sang-Jun (Department of Molecular Science and Technology, Ajou University) ;
- Kim, Sang-Youl (Department of Molecular Science and Technology, Ajou University)
- Published : 2003.07.01
Abstract
To increase the high-density data storage, a new technique of Super-resolution near-field structure (Super-RENS) consisted of glass／SiN／Sb or AgOx／SiN has been proposed and investigated intensively as a promising structure for near-field ultrahigh-density optical storage. Hence it is important to determine the optical properties of AgOx by using ellipsometry. AgOx thin films were prepared by using magnetron sputtering technique while oxygen flow rate was varied, and the film growth of AgOx were monitored by using in situ ellipsometer. (omitted)
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