분해능 향상 및 대구동 변위를 위한 보이스코일 모터의 설계

Design of VCM(Voice Coil Motor) for improvement in resolution and driving in a large displacement

In this paper, a design of VCM(Voice Coil Motor) for the measurement system of nano-level force and displacement was proposed and developed. This paper present the VCM shape for improvement of position resolution and guarantee of a large displacement. And then the finite element analysis method(FEM) utilized to produce linear driving thrust and satisfy required thrust of the system. The result shows the applicable possibility of the proposed VCM as a study for nano-level measurement system.