대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2003년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.293-296
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- 2003
질량 분석기에 응용할 수 있는 탄소나노튜브를 이용한 전자방출원 제작
Fabrication of CNT(Carbon Nanotubes) Emitter for Mass Spectrometer
- Jeong, D.J. (Division of Electronics Engineering, AJOU University) ;
- Yoon, H.J. (Division of Electronics Engineering, AJOU University) ;
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Jung, K.W.
(Division of Electronics Engineering, AJOU University)
;
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Yang, S.S.
(Wonkwang University)
- 발행 : 2003.10.31
초록
We report on the fabrication and field emission of carbon nanotube field emitters for mass spectrometer. Due to its high aspect ratio and mechanical strength, we use vertically aligned multi-wall carbon nanotubes prepared by thermal chemical vapour deposition as cathodes, Electrons emitted from a CNT are to ionize some sample molecules. We have successfully attained patterned carbon nanotubes grown on two-dimensional 0.7 mm by 0.7 mm Ni square blocks on Si. The emission characteristics show that the field emission initiates at 200 V.
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