한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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- Pages.164-167
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- 2003
반응성 스퍼터링 장치로 제작된 질화탄소막의 결정성 분석
Crystalline Analysis of Carbon Nitride Films Deposited by Reactive Sputtering System
- Lee, Ji-Gong (Department of Electrical and Electronic Engineering, Kyungnam Univ.) ;
- Ha, Se-Geun (Department of Electrical and Electronic Engineering, Kyungnam Univ.) ;
- Lee, Sung-Pil (Department of Electrical and Electronic Engineering, Kyungnam Univ.)
- 발행 : 2003.07.10
초록
Carbon nitride films with