Characteristic Prediction and Analysis of 3-D Embedded Passive Devices

3차원 매립형 수동소자의 특성 예측 및 분석에 대한 연구

  • 신동욱 (연세대학교 전기전자공학과) ;
  • 오창훈 (연세대학교 전기전자공학과) ;
  • 이규복 (전자부품연구원 무선통신연구센터) ;
  • 김종규 (전자부품연구원 무선통신연구센터) ;
  • 윤일구 (연세대학교 전기전자공학과)
  • Published : 2003.07.10

Abstract

The characteristic prediction and analysis of 3-dimensional (3-D) solenoid-type embedded inductors is investigated. The four different structures of 3-D inductor are fabricated by using low-temperature cofired ceramic (LTCC) process. The circuit model parameters of the each building block are optimized and extracted using the partial element equivalent circuit method and HSPICE circuit simulator. Based on the model parameters, predictive modeling is applied for the structures composed of the combination of the modeled building blocks. And the characteristics of test structures, such as self-resonant frequency, inductance and Q-factor, are analyzed. This approach can provide the characteristic conception of 3-D solenoid embedded inductors for structural variations.

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