Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Design and Fabrication of Novel Linear Ultrasonic Motor

선형 초음파 모터 설계 및 제작

  • 이동균 (한국과학기술연구원 박막재료연구센터) ;
  • 한득영 (건국대학교 전기공학과) ;
  • 최지원 (한국과학기술연구원 박막재료연구센터) ;
  • 김현재 (한국과학기술연구원 박막재료연구센터) ;
  • 윤석진 (한국과학기술연구원 박막재료연구센터)
  • Published : 2003.07.10
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Abstract

In the paper, the novel linear ultrasonic motor for precision position control was designed and fabricated. It was composed of two piezoelectric actuators with longitudinal ultrasonic fluctuations and shaking beam. When two AC electric fields ($Usin{\omega}t$, $Ucos{\omega}t$) were applied in two piezoelectric actuators respectively, the middle part of shaking beam had an elliptical trajectory. According to experimental results, good symmetrical characteristic of two piezoelectric actuators were obtained.

Keywords