한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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- Pages.888-891
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- 2003
고온용 마이크로 세라믹 박막형 압력센서의 제작과 그 특성
Fabrication of Micro Ceramic Thin-Film Type Pressure Sensors for High-Temperature Applications and Its Characteristics
- Kim, Jae-Min (Dongseo Univ.) ;
- Lee, Jong-Choon (Kyungnam Information College) ;
- Chung, Gwiy-Sang (Dongseo Univ.)
- 발행 : 2003.07.10
초록
This paper describes on the fabrication and characteristics of micro ceramic thin-film type pressure sensors based on Ta-N strain-gauges for high-temperature applications. The Ta-N thin-film strain-gauges are deposited onto thermally oxidized Si diaphragms by RF sputtering in an argon-nitrogen atmosphere(