Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.07b
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- Pages.950-952
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- 2003
Fabrication of Disposable pH Sensor with Micro-volume Type
Micro-volume형 일회용 pH 센서 제작
- Jung, Ho (Yeongnam Univ.) ;
- Kim, Heung-Rak (Yeongnam Univ.) ;
- Kim, Young-Duk (Yeongnam Univ.) ;
- Jung, Woo-Chul (Yeongnam Univ.) ;
- Kim, Dong-Su (Yeongnam Univ.) ;
- Nam, Hyo-Duk (Yeongnam Univ.)
- Published : 2003.07.10
Abstract
This paper have been studied fabrication and characteristics of disposable pH sensor using MEMS technology. The sensor has two open-well structure, the container for the internal electrolyte and electrode were formed by anisotropically etching a silicon substrate. unlike currently used KCI saturated solution, the structure was introduced hydrogel which take an advantage of miniaturization, bulk product, a low price. PU and CA/TP used to measurement ion detection, one is reference membrane and the other is pH. fabricated sensor is encapsulated entirely with epoxy, finally sensor was estimated various ion sorts and pH ranges.