한국정보통신설비학회:학술대회논문집

한국정보통신설비학회 (Korea Institute of Information and Telecommunication Facilities Engineering)
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정보통신 소자 응용을 위한 단결정 실리콘 마이크로 미러 어레이

Single crystalline silicon micyomirror array for data communication applications

  • 장윤호 (서울대학교 전기.컴퓨터 공학부) ;
  • 이국녕 (서울대학교 화학공학부) ;
  • 김용권 (서울대학교 전기.컴퓨터 공학부)
  • Jang Yun-Ho (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Lee Kook-Nyung (School of Chemical Engineering, Seoul National University) ;
  • Kim Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 발행 : 2003.08.01
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초록

We have designed and fabricated a micromirror array using single crystalline silicon (SCS) for data communication applications. The mirror array has $16{\times}16$ micromirrors and each mirror has $120{\mu}m{\times}100{\mu}m$ reflective surface. Electrostatic force was adopted as a driving mechanism. The spring dimensions were determined using relationship between spring dimensions and driving voltage. The designed tilting angle was $9.6^{\circ}$, and measured tilting angle according to applied voltages were experimented. The response time was measured using He-Ne laser and position sensitive diode (PSD), and lifetime was checked for reliability proof.

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