In-line System for Large Scale OLED Manufacturing using Nozzle Source

  • Published : 2003.07.09

Abstract

When manufacturing large sized OLED devices, the evaporation source is the most important technology. The nozzle source maintains the uniformity of the large-size deposited organic thin film at the 2-3% level and its usage is only 0.8 gram/hour. The in-line manufacturing deposition system combining with an encapsulation system is proposed.

Keywords