한국정보디스플레이학회:학술대회논문집
- 2003.07a
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- Pages.421-424
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- 2003
Atmospheric Plasma application for dry cleaner, PR ashing & PI rework in the $5^{th}$ generation and beyond LCD production
- Park, Young-Chun (KCTech Research Center & School of CS&EE, Handong Global University) ;
- Lee, Bong-Ju (KBSI)
- Published : 2003.07.09
Abstract
An AP plasma technology has been developed for the application of dry cleaner, PR ashing and PI rework in the large glass size. The technology is cost effective, environment friendly, and best fits for coming generation LCD production since the design is easily scalable to bigger size glasses. Surface cleaning results based on the contact angle study has been presented for
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