한국정보디스플레이학회:학술대회논문집
- 2003.07a
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- Pages.626-629
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- 2003
Inspection for Process Improvement during High-Resolution Large-Size LTPS TFT Manufacturing
- Chang, Jiun-Jye (Electronics Research and Service Organization/Industrial Technology Research Institute (ERSO/ITRI)) ;
- Chen, Chih-Chiang (Electronics Research and Service Organization/Industrial Technology Research Institute (ERSO/ITRI)) ;
- Chuang, Ching-Sang (Electronics Research and Service Organization/Industrial Technology Research Institute (ERSO/ITRI)) ;
- Wu, Yung-Fu (Electronics Research and Service Organization/Industrial Technology Research Institute (ERSO/ITRI)) ;
- Sheu, Chai-Yuan (Electronics Research and Service Organization/Industrial Technology Research Institute (ERSO/ITRI))
- Published : 2003.07.09
Abstract
In order to achieve high-resolution and large-size displays, inspection technology is necessary and important. It is a powerful utility for process and yield improvement for the high valued panel realization. We indicated the challenge of advanced panel manufacturing on inspection ability and throughput. We also investigated the method to judge laser-crystallizing energy by inspection technology. Finally, the total defect number and critical killer defects were classified and discussed in this work.
Keywords