Cu as an Electrode Material in TFT-LCD Products

  • Park, C.W. (MNT/TV Development Division, LG.Philips LCD) ;
  • Cho, W.H. (MNT/TV Development Division, LG.Philips LCD) ;
  • Kim, K.T. (MNT/TV Development Division, LG.Philips LCD) ;
  • Choi, H.C. (MNT/TV Development Division, LG.Philips LCD) ;
  • Oh, C.H. (MNT/TV Development Division, LG.Philips LCD)
  • Published : 2003.07.09

Abstract

In this paper, production of TFT-LCD adopting Cu electrode, in spite of low resistivity, which was not commercially applied to TFT LCD products because of processibility, reliability problems etc. was mentioned. Based on the test result of etch and strip process of Cu electrode, the TFT device using Cu material shows the same characteristics as the conventional TFT devices. We describe the realization of a 20.1" UXGA model which was firstly applied to Cu electrode.

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