Microstucture and Crystal Orientation of Poly-Si crystallized by SLS & ELA

  • Chung, Ui-Jin (LTPS Group AMLCD division Samsung Electronics) ;
  • Lee, Jae-Bok (LCD R&D center AMLCD division Samsung Electronics) ;
  • Chung, Se-Jin (LCD R&D center AMLCD division Samsung Electronics) ;
  • Cho, Sung-Hwan (LCD R&D center AMLCD division Samsung Electronics) ;
  • Tsutomu, Uemoto (LCD R&D center AMLCD division Samsung Electronics) ;
  • Kim, Chi-Woo (LCD R&D center AMLCD division Samsung Electronics) ;
  • Chung, Kyu-Ha (LCD R&D center AMLCD division Samsung Electronics)
  • Published : 2003.07.09