한국정보디스플레이학회:학술대회논문집
- 2003.07a
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- Pages.855-858
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- 2003
The Structure and Electrical Characteristics of CNTs Depending on the Hydrogen Plasma Treatment
- Uh, Hyung-Soo (Dept. of Electronics Eng., Sejong Univ.) ;
- Lee, Soo-Myun (Dept. of Electronics Eng., Sejong Univ.) ;
- Jeon, Pil-Goo (Dept. of Electronics Eng., Sejong Univ.) ;
- Kwak, Byung-Hwak (Dept. of Electronics Eng., Sejong Univ.) ;
- Park, Sang-Sik (Dept. of Electronics Eng., Sejong Univ.) ;
- Cho, Euo-Sik (School of Electrical Eng., Seoul Nat'l Univ.) ;
- Lee, Jong-Duk (School of Electrical Eng., Seoul Nat'l Univ.) ;
- Kwon, Sang-Jik (Dept. of Electronics Eng., Kyungwon University)
- Published : 2003.07.09
Abstract
Carbon nanotubes (CNTs) were grown on Ni-coated TiN/Si substrate by microwave plasma chemical vapor deposition using mixture gas of
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