Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05e
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- Pages.92-95
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- 2003
Optical Properties of Inductively Coupled Plasma with Ar Gas Pressure and RF Power (13.56MHz)
Ar 가스압력과 RF 전력변화 (13.56MHz)에 따른 유도결합형 플라즈마의 광학적 특성
- Her, In-Sung (Wonkwang University) ;
- Kim, Kwang-Soo (Wonkwang University) ;
- Choi, Yong-Sung (Wonkwang University) ;
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Lee, Jong-Chan
(Wonkwang University)
;
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Park, Dea-Hee
(Wonkwang University)
- Published : 2003.05.30
Abstract
In this paper, the emission properties of electrodeless fluorescent lamp were discussed using the inductively coupled plasma. To transmit the electromagnetic energy into the chamber, a RF power of 13.56MHz was applied to the antenna and considering the Ar gas pressure and the RF electric power change, the emission spectrum, Ar-I line, luminance were investigated. At this time the input parameter for ICP RF plasma, Ar gas pressure and RF power were applied in the range of 10~60m Torr, 10~300W respectively.