Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05c
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- Pages.57-60
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- 2003
Frequency property of FBAR RF fitter using PZT
FBAR(Film Bulk Acoustic Resonator)의 주파수 특성에 관한 연구
- Yun, Chang-Jin (SungKyunKwan Uni.) ;
- Jung, Yung-Hak (SungKyunKwan Uni.) ;
- Kim, Eung-Kwon (SungKyunKwan Uni.) ;
- Song, Jun-Tae (SungKyunKwan Uni.)
- Published : 2003.05.16
Abstract
This paper describes the modeling and simulation results for film bulk acoustic resonators(FBAR). We present the frequency tuning mechanisms, analytical solutions of the wave equation and the influence of the thickness of the electrodes. The impedance for PZT based FBAR is derived utilizing proper boundary conditions and their material parameters. Ferroelectrics-based RF filter composed of FBARs are designed.