Growth of a-Se:Te thick films for Hybrid X-ray sensor technology

Hybrid 형 X선 Sensor 기술을 위한 a-Se:Te 필름의 성장

  • Published : 2003.05.16

Abstract

a-Se film is known as promising medical X-ray detector material but a-Se as dopanted Tellurium is not available in X-ray detectors. a-Se thick film was grown by vacuum thermal evaporator to $3{\mu}m$ thickness. The characteristics of thick films were analyzed by XRD, U-V Meter, and SEM measurements. Te composition is 0.1, 0.3, 0.5, 0.7g. This paper is fundmental data for phosphor layer's essential parameter that selenium have absorption wavelength along to various Te concentration rate.

Keywords