Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05a
- /
- Pages.30-33
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- 2003
The effect of deposition temperature/pressure on the superconducting properties of YBCO coated conductor
YBCO coated conductor의 초전도 특성에 미치는 박막 증착 온도/압력의 영향
-
Park, Chan
(Korea Electrotechnology Research Institute)
;
-
Ko, Rok-Kil
(Korea Electrotechnology Research Institute)
;
- Chung, Jun-Ki (Korea Electrotechnology Research Institute) ;
- Choi, Soo-Jeong (Korea Electrotechnology Research Institute) ;
- Song, Kyu-Jeong (Korea Electrotechnology Research Institute) ;
- Park, Yu-Mi (Korea Electrotechnology Research Institute) ;
- Shin, Ki-Chul (Busan National University) ;
- Shi, Dongqi (Korea Electrotechnology Research Institute) ;
- Yoo, Sang-Im (Seoul National University)
-
박찬
(한국전기연구원)
;
-
고락길
(한국전기연구원)
;
- 정준기 (한국전기연구원) ;
- 최수정 (한국전기연구원) ;
- 송규정 (한국전기연구원) ;
- 박유미 (한국전기연구원) ;
- 신기철 (부산대학교 무기재료공학과) ;
- ;
- 유상임 (서울대학교 재료공학부)
- Published : 2003.05.23
Abstract
YBCO coated conductor, also called the 2nd generation high temperature superconducting wire, consists of oxide multi-layer hetero-epitaxial thin films. Pulsed laser deposition (PLD) is one of many film deposition methods used to make coated conductor, and is the one known to be the best to make superconducting layer so far. As a part of the effort to make long length coated conductor, the optimum deposition condition of YBCO film on single crystal substrate (SrTiO3) was investigated using PLD. Substrate temperature, oxygen partial pressure, and laser fluence were varied to find the best combination to grow high quality YBCO film.