Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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A Study of Position Control and Design for Microelectrostatic Mechanical Actuator

미세 작동기의 설계 및 위치 제어에 관한 연구

  • 최원석 (고려대학교 제어계측공학과 대학원) ;
  • 지태영 (고려대학교 제어계측공학과 대학원) ;
  • 김건년 (전자부품 연구원 나노메카트로닉스) ;
  • 박효덕 (전자부품 연구원 나노메카트로닉스) ;
  • 허훈 (고려대학교 제어측공학과)
  • Published : 2003.04.23
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Abstract

Microactuator is frequently used in some optical or electrical applications such as light modulators and spatial scanner devices. When microactuator is implemented, it should be operated at accurate positions proportional to input voltage. Therefore in order to obtain rapid responses and reduced errors, a position control technique is used. In the paper, design procedure for the mems actuator and a typical PID controller is adapted to improve performance of microactuator as well. Also electrostatic force for the torsional microactuator is calculated via well-known Hornbeck's method.

Keywords