Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2003.04a
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- Pages.1104-1110
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- 2003
Measurement Techniques of Mechanical Properties for Development of Nano Fabrication Process
나노 공정 개발을 위한 기계적 물성 측정 기법
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Lee, H.J.
;
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Choi, B.I.
;
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Kim, W.D.
;
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Oh, C.S.
;
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Han, S.W.
;
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Hur, S.
;
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Kim, J.H.
;
- Ko, S.G. ;
- Ahn, H.G.
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이학주
(한국기계연구원 마이크로응용역학그룹)
;
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최병익
(한국기계연구원 마이크로응용역학그룹)
;
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김완두
(한국기계연구원 마이크로응용역학그룹)
;
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오충석
(금오공과대학교 기계공학부)
;
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한승우
(한국기계연구원 마이크로응용역학그룹)
;
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허신
(한국기계연구원 신교통시스템그룹)
;
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김재현
(한국기계연구원 마이크로응용역학그룹)
;
- 고순규 (한국기계연구원 마이크로응용역학그룹) ;
- 안현균 (금오공과대학교 기계공학부)
- Published : 2003.04.23
Abstract
There are many applications of nanostructures, have been suggested by lots of researchers. It is highly required to measure the properties of nano-sized materials for design and fabrication of the nanostructures. In this paper, several techniques for measuring the mechanical properties of nano-structures are presented laying emphasis on the activity of Nano Property Measurement Team in KIMM. Some advanced applications of nano-indenter are described for measuring elastic, visco-elastic, frictional and adhesive properties as well as the standard methods of it. Micro-tensile test technique with accurate in-plane strain measurement method is also presented and its role in the property measurement of nanostructures is discussed.
Keywords