Room-temperature Preparation of $Al_2O_3$ Thick Film by Aerosol Deposition and Simulation of 10 GHz-LC Filter for Intergrated RF Module

  • Nam, S.M. (Department of Inorganic Materials, Tokyo Institute of Technology, National Institute of Advanced Industrial Science and Technology) ;
  • Mori, N. (National Institute of Advanced Industrial Science and Technology) ;
  • Kakemoto, H. (Department of Inorganic Materials, Tokyo Institute of Technology) ;
  • Tsurumi, T. (Department of Inorganic Materials, Tokyo Institute of Technology) ;
  • Akedo, J. (National Institute of Advanced Industrial Science and Technology)
  • 발행 : 2003.04.18