Interface Control of Pt/GaAs Schottky Contact with Surface Sulfidation and Termal Hydrogenation

  • Yang, Jun-Kyu (Department of Ceramic Engineering, Yonsei University) ;
  • Park, Hyung-Ho (Department of Ceramic Engineering, Yonsei University) ;
  • Kim, Hee-Cheon (Semiconductor Technology Division, Electronics and Telecommunication Research Institute)
  • 발행 : 2003.04.18