Formation, Characterization and Applicatoin of Self-patternable PZT Thin Film

  • Hwang, Jae-Seob (Department of Ceramic Engineering, Yonsei University) ;
  • Kang, Ghi-Yuun (Department of Ceramic Engineering, Yonsei University, Microsystem Center, Korea Institute of Science and Technology) ;
  • Park, Hyung-Ho (Department of Ceramic Engineering, Yonsei University) ;
  • Kim, Tae-Song (Microsystem Center, Korea Institute of Science and Technology)
  • 발행 : 2003.04.18