한국세라믹학회:학술대회논문집 (Proceedings of the Korean Ceranic Society Conference)
- 한국세라믹학회 2003년도 추계총회 및 연구발표회 초록집
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- Pages.40.1-40
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- 2003
Effect of $O_2$ Partial Pressure on Properties of Transparent $AlO_x$ Thin Films Deposited by Reactive Ion Beam Sputtering
- Seong, J.W. (R & D Center, P & I Corp, Shinnae Techotown) ;
- Yoon, K.H. (Department of Ceramic Engineering, Yonsei University) ;
- Kim, K.H. (R & D Center, P & I Corp, Shinnae Techotown) ;
- Koh, S.K. (R & D Center, P & I Corp, Shinnae Techotown)
- 발행 : 2003.10.17