Effect of Porous $SiO_2$ Buffer Layer between $Y_2O_3$ Coating and Quartz Substrate for Reduced Thermal Mismatch Stress

  • Lee, Sun-Woo (Korea Institute of Ceramic Engineering and Technology, Department of Ceramic Engineering, Hanyang University) ;
  • Riu, Doh-Hyung (Korea Institute of Ceramic Engineering and Technology) ;
  • Jung, Young-Guen (Korea Institute of Ceramic Engineering and Technology) ;
  • Choi, Sung-Churl (Department of Ceramic Engineering, Hanyang University)
  • 발행 : 2003.10.17