A Study on the Measurement Methodology of Characteristics of the Vibratory Micro Gyroscope Using the Quality factor and the Resonant Displacement

Quality factor 와 공진시 변위 측정을 이용한 진동형 자이로스코프의 특성 평가에 관한 연구

In this paper, the new measurement methodology of characteristics of the vibratory micro gyroscope using Quality factor and the resonant displacement was proposed. Because the Quality factor has a large error under the high Quality factor condition, it is difficult to analyze the characteristics of the vacuum packaged vibratory micro gyroscopes with the Quality factor. We analyzed mechanical characteristics of gyroscope with the value of Quality factor. We described measurement errors of mechanical characteristics of micro gyroscopes. The measured value of Quality factor is 47532 and error range of Quality factor is from -29.8 % to 73.9 %. The value of resonant displacement is 3.4${\mu}m$ and the measurement error is 2.9 %. From the result of Quality factor degradation and resonant displacement degradation, 1698 days and 1503 days were estimated as Time To Failure (TTF), respectively. The range of estimation error of Quality factor degradation and resonant displacement degradation is calculated from 1246 days to 1832 days and from 1456 days to 1537 days, respectively. We can analyze the characteristics of the vibratory gyroscope using the quality factor when the Quality factor is smaller than 10,000. Also we can analyze that using the resonant displacement when the Quality factor is larger than 10,000.