대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)

대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

공진주파수 스펙트럼법을 이용한 압전박막의 특성 평가

Evaluating Piezoelectric Thin Film Characteristics Using Resonance Spectrum Method

  • 최준영 (인하대학교 전자 전기공학부) ;
  • 장동훈 (인하대학교 전자 전기공학부) ;
  • 강성준 (여수대학교 반도체학과) ;
  • 윤영섭 (인하대학교 전자 전기공학부)
  • Choi Joon Young (Dept. of Electric & Electrical Engineering, Inha University) ;
  • Chang Dong Hoon (Dept. of Electric & Electrical Engineering, Inha University) ;
  • Kang Seong Jun (Dept. of Semiconductor Materials & Devices, Yosu National University) ;
  • Yoon Yung Sup (Dept. of Electric & Electrical Engineering, Inha University)
  • 발행 : 2004.06.01
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초록

We studied the characteristics of impedance and electromechanical coupling coefficient in ZnO and AIN thin films by using resonance frequency spectrum method. The response peak of impedance decreased with the decrease of thickness of piezoelectrics, the number of mode of response peak increased with the increase of substrate thickness. An error of $k_{t}^{2}$ estimated from input $k_{t}^{2}$ increased as the thickness of piezoelectrics decreased and the thickness of substrate increased. Also, the error was increased in case of a large acoustic impedance of substrate. It was found that the composite resonator operating in optimized condition could be designed through the resonance frequency spectrum analysis of composited resonator consisted of piezoelectric thin film and substrate.

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