A Numerical Study on the Flow Characteristics of a Valveless Micropump

무밸브 마이크로 펌프의 유동 특성에 관한 수치해석

The performance of a valveless micropump driven by chamber wall oscillation was numerically investigated for various frequency and amplitude of the oscillation. The numerical study was performed in the range of oscillation frequency from 200Hz to 1000Hz and amplitude from $1{\mu}m$ to $15{\mu}m$. And optimal values for the parameters are found. At the oscillation frequency 600Hz, the net flow rate of micropump shows a maximum value. Also the results show good agreement with the experimental results. The total flow rate was increased with the oscillation amplitude. However, the net flow rate was found to be decreased over $7{\mu}m$.