한국세라믹학회:학술대회논문집 (Proceedings of the Korean Ceranic Society Conference)
- 한국세라믹학회 2004년도 춘계총회 및 연구발표회 초록집
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- Pages.36.3-36.3
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- 2004
Influence of Assisted lon Energy on Properties of Transparent $SiO_x$ Thin Films Deposited by Dual Ion Beam Sputtering (DIBS)
- Seong J.W (R & D Center, P & I Co.) ;
- Yoon K. H. (Department of Ceramic Engineering, Yonsei University) ;
- Kim K. H. (R & D Center, P & I Co.) ;
- Koh S. K. (R & D Center, P & I Co.)
- 발행 : 2004.04.01