The discharge characteristic of plasma reactor for $CF_4$ decomposition

$CF_4$ 분해용 플라즈마 반응기의 방전 특성

we studied the effect of the type of non-thermal plasma on the decomposition of $CF_4$. 3 types of reactors were manufactured to generate different types of plasma respectively, and went into the experiments. As the results, we found that high density of the energy of non-thermal plasma and the minimization of non-discharged area should be met in order to elevate decomposition rate of $CF_4$. Among the reactors used in the study, the hole-type reactor was such one that satisfying that requirement. Using the hole-type reactor, treatment efficiency for high concentration of $CF_4$ was excellent. We got decomposition rate of more than 95[%] between 500[ppm] around and less than 400[ppm], and up to 85[%] at 900[ppm].