Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Orientation of $(Na_{1/2}Bi_{1/2})TiO_3$ thin films deposited on $LaNiO_3$ electrodes by sol-gel methode

졸-겔법으로 $LaNiO_3$ 전극에 증착된 $(Na_{0.5}Bi_{0.5})TiO_3$ 박막의 배향성

  • Published : 2004.07.05
Download PDF
⟨ Previous Next ⟩

Abstract

Sodum bismuth titanate $(Na_{0.5}Bi_{0.5}TiO_3$ or NBT) thin films coated on the $LaNiO_3$ (LNO) electrode by sol-gel methode and rapid thermal annealing (RTA) technique. The NBT (NBT/LNO/Si) thin films examined by x-ray diffraction (XRD). The orientation of NBT was observed for films coated at $900^{\circ}C$, 5 min and $600^{\circ}C$, 60 min. Filed emission scanning electron microscopy (FE-SEM) showed uniform surface composed of grains. The grain size of NBT thin films increased with increasing annealing temperature.

Keywords