Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.916-919
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- 2004
(100) orientation of PZT thin films coated on the LNO electrode using a different manufacturing process
제조 공정을 달리한 LNO 전극에 코팅된 PZT 박막의 배향성
- Seo, Byung-Jun (Pukyong National Uni.) ;
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Moon, Byung-Kee
(Pukyong National Uni.)
;
- Kim, Kang-Eon (Pukyong National Uni.) ;
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Chung, Su-Tae
(Pukyong National Uni.)
- Published : 2004.07.05
Abstract
This paper studied about the (100) orientation of PZT thin films coated on the LNO electrode using a different thermal annealing. The thermal annealing method is divided into two things. The one is the method transferring heat to only the lower substrate and another is transferring heat to all directions. Orientation factor of PZT in the method of transferring heat to only the lower substrate was F=99% in the thermal annealing of the LNO. Orientation factor of PZT was F=67% in the method of transferring heat to all directions.