Elastic Property Extraction System of Polycrystalline Thin-Films for Micro-Electro-Mechanical System Device and Application to Polycrystalline Materials

MEMS 부품을 위한 다결정 박막의 탄성 물성치 추출 시스템과 다결정 재료의 적용

A numerical system to extract effective elastic properties of polycrystalline thin-films for MEMS devices is already developed. In this system, the statistical model based on lattice system is used for modeling the microstructure evolution simulation and the key kinetics parameters of given micrograph, grain distributions and deposition process can be extracted by inverse method proposed in the system. In this work, the effective elastic properties of polysilicon, $BaTiO_3\;and\;ZrTiO_4$ are extracted using this system and by employing the fraction of the potential site($f_P$) as a kinetics parameter for the microstructure evolution, the statistical tendency of these materials is studied.