Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Optimization of Groove Sizing in CMP using CFD

CFD를 이용한 CMP의 Groove Sizing 최적화

  • 장지환 (한양대학교 대학원 기계공학과) ;
  • 이도형 (한양대학교 기계정보공학부)
  • Published : 2004.11.03
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Abstract

In this paper, slurry fluid motion, abrasive particle motion, and effects of groove sizing on the pads are numerically investigated in the 2D geometry. Groove depth is optimized in order to maximized the abrasive effect. The simulation results are analyzed in terms of shear stress on pad, groove and wafer, streamline and velocity vector. The change of groove depth entails vortex pattern change, and consequently affects material removal rate. Numerical analysis is very helpful for disclosing polishing mechanism and local physics.

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