Stochastic Analysis of Self-sustained Oscillation Loop for a Resonant Accelerometer

In this paper, a nonlinear feedback system is analyzed for a surface micromachined resonant accelerometer. For this, a brief illustration of the plant dynamics is given. In the analysis, the periodic signal in the nonlinear feedback loop is obtained by the limit cycle point, which is best approximated via the describing function method. Considering the characteristic feature of plant dynamics, a simple phase shifted relay with finite slope is designed for the nonlinearity implementation. With a describing function for random plus sinusoidal input, we analyzed the effect of a white Gaussian noise on oscillation frequency. Finally, simulation and experimental result is given.