Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Lour Voltage Operated RFMEMS Switch for Advanced Mobile System Applications

차세대 이동통신시스템에 적용을 위한 저전압구동의 RFMEMS 스위치

  • Seo, Hye-K. (Micro/Nano Devices & Packaging Lab. Department of Electronic Engineering, Kwangwoon University) ;
  • Park, Jae-Y. (Micro/Nano Devices & Packaging Lab. Department of Electronic Engineering, Kwangwoon University)
  • 서혜경 (마이크로/나노 소자 및 패키징 연구실, 전자공학과, 광운대학교) ;
  • 박재영 (마이크로/나노 소자 및 패키징 연구실, 전자공학과, 광운대학교)
  • Published : 2005.07.18
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Abstract

A low voltage operated piezoelectric RF MEMS in-line switch has been realized by using silicon bulk micromachining technologies for advanced mobile/wireless applications. The developed RF MEMS in-line switches were comprised of four piezoelectric cantilever actuators with an Au contact metal electrode and a suspended Au signal transmission line above the silicon substrate. The measured operation dc bias voltages were ranged from 2.5 to 4 volts by varying the thickness and the length of the piezoelectric cantilever actuators, which are well agreed with the simulation results. The measured isolation and insertion loss of the switch with series configuration were -43dB and -0.21dB (including parasitic effects of the silicon substrate) at a frequency of 2GHz and an actuation voltage of 3 volts.

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