Fabrication of micro mirror array for small form factor optical pick-up by micro UV-molding

마이크로 UV 성형을 통한 초소형 광픽업용 마이크로 미러 어레이 제작

In this study, micro mirror array for small form factor optical pick-up was replicated by micro UV-molding. First, mold for micro mirror array was fabricated using micromachining. Also, to analyze the characteristics of the surface quality, flatness of replicated mirror surface were measured by white light scanning inteferometry system. The results show that the micro mirror array with a sufficient surface quality can be obtained by polymer replication process.