한국신재생에너지학회:학술대회논문집

한국신·재생에너지학회 (Korean Society for New and Renewable Energy)
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실리콘 박막 태양전지에서 광 포획(light trapping) 개선에 관한 연구

STUDY ON THE IMPROVEMENT OF LIGHT TRAPPING IN THE SILICON-BASED THIN-FILM SOLAR CELLS

  • Jeon Sang Won (Solar Cells Research Center, Korea Institute of Energy Research, Dept. of Inorganic Materials Engineering, Kyungpook National University) ;
  • Lee Jeong Chul (Solar Cells Research Center, Korea Institute of Energy Research) ;
  • Ahn Sae Jin (Solar Cells Research Center, Korea Institute of Energy Research) ;
  • Yun Jae Ho (Solar Cells Research Center, Korea Institute of Energy Research) ;
  • Kim Seok Ki (Solar Cells Research Center, Korea Institute of Energy Research) ;
  • Park Byung Ok (Dept. of Inorganic Materials Engineering, Kyungpook National University) ;
  • Song Jinsoo (Solar Cells Research Center, Korea Institute of Energy Research) ;
  • Yoon Kyung Hoon (Solar Cells Research Center, Korea Institute of Energy Research)
  • 발행 : 2005.06.01
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초록

The silicon thin film solar cells were fabricated by 13.56 MHz PECVD (Plasma-Enhanced Chemical-Vapor Deposition) and 60 MHz VHF PECVD (Very High-Frequency Plasma-Enhanced Chemical-Vapor Deposition). We focus on textured ZnO:Al films prepared by RF sputtering and post deposition wet chemical etching and studied the surface morphology and optical properties. These films were optimized the light scattering properties of the textured ZnO:Al after wet chemical etching. Finally, the textured ZnO:Al films were successfully applied as substrates for silicon thin films solar cells. The efficiency of tandem solar cells with $0.25 cm^2$ area was $11.8\%$ under $100mW/cm^2$ light intensity. The electrical properties of tandem solar cells were measured with solar simulator (AM 1.5, $100 mW/cm^2)$ and spectral response measurements.

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