Compositional change of MgO barrier and interface in CoFeB/MgO/CoFeB tunnel junction after annealing

  • Bae J.Y, (Department of Materials Science and Engineering, KAIST) ;
  • Kim H.J. (Department of Materials Science and Engineering, KAIST) ;
  • Lim W.C. (Department of Materials Science and Engineering, KAIST) ;
  • Kim D.J, (Department of Materials Science and Engineering, KAIST) ;
  • Kim E.W. (Device Lab., SAIT) ;
  • Kim T.W. (Device Lab., SAIT) ;
  • Lee T.D. (Department of Materials Science and Engineering, KAIST)
  • 발행 : 2005.12.01