한국신재생에너지학회:학술대회논문집
- 한국신재생에너지학회 2005년도 제17회 워크샵 및 추계학술대회
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- Pages.568-571
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- 2005
태양전지용 ZnO:Al 투명 전도막 제작
Preparation of ZnO:Al transparent conductive films for solar cell
초록
Highly transparent ZnO films with low resistivity for thin film solar cell applications were fabricated at low temperature by rf magnetron sputtering. Al-doped ZnO films were deposited on glass substrates at a substrate temperature of