Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
- /
- Pages.264-266
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- 2005
A Study on Development of PLD Process for PM OLED Device Manufacture
PM OLED 디바이스 제작을 위한 PLD 공정 개발에 관한 연구
- Lee, Eui-Sik (Soonchunhyang Univ) ;
- Lee, Byoung-Wook (Soonchunhyang Univ) ;
-
Kim, Chang-Kyo
(Soonchunhyang Univ)
;
- Hong, Jin-Su (Soonchunhyang Univ) ;
- Park, Sung-Hoon (Soonchunhyang Univ) ;
- Moon, Soon-Kwun (Soonchunhyang Univ)
- 이의식 (순천향대학교 정보기술공학부) ;
- 이병욱 (순천향대학교 정보기술공학부) ;
-
김창교
(순천향대학교 정보기술공학부)
;
- 홍진수 (순천향대학교 정보물리공학부) ;
- 박성훈 (순천향대학교 정보물리공학부) ;
- 문순권 (순천향대학교 정보물리공학부)
- Published : 2005.11.10
Abstract
Manufacture of OLED device used thermal evaporation method. However thermal evaporation method has many defect as thermal damage of substrate, difficult of dopant rate control and low utilization of organic materials. so we suggest PLD(Pulsed Laser Deposition) method that solution of these problems. PLD method has many advantage as without thermal damage, easy indicate of deposition rate per one pulse and good utilization of organic materials. In this paper we apply the PLD method for manufacture of device so we present high efficiency device manufacture using PLD method that has good deposition uniformity, surface rough and deposition rate.