Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
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- Pages.354-355
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- 2005
Electrical and Optical Properties of ITO Thin Film by CMP Process Parameter
CMP 공정이 ITO 박막의 전기적.광학적 특성에 미치는 영향
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Choi, Gwon-Woo
(Chosun University)
;
- Seo, Yong-Jin (Daebul University) ;
- Lee, Woo-Sun (Chosun University)
- Published : 2005.11.10
Abstract
Indium tin oxide (ITO) thin film was polished by chemical mechanical polishing (CMP) by the change of process parameters for the improvement of electrical and optical properties of ITO thin film. Light transparent efficiency of ITO thin film was improved after CMP process at the optimized process parameters compared to that before CMP process.